- ['外延', '外延', '#1EPIWA-BA3', 'V01', '1'],
- ['激光打标', '激光打标', '#1LASERMARK', 'V01', '2'],
- ['外延片清洗(1212)', '外延片清洗', '#3HCL0NC10M', 'V01', '3'],
- ['有机清洗', '#3SC1UNC10M', 'V01', '4'],
- ['ITO蒸发(1712)', 'ITO蒸发', '#4ITOEG103K', 'V01', '5'],
- ['检查', '#3ZDJY0D1J1', 'V01', '6'],
- ['ITO腐蚀光刻(1712)', '正胶匀胶', '#2304J00102', 'V01', '7'],
- ['正胶曝光2FG0506-1-N', '#2ITO000001', 'V01', '8'],
- ['显影1', '#2CS0000150', 'V01', '9'],
- ['显影后检查', '#2XYHJYD5J1', 'V01', '10'],
- ['ITO腐蚀(1712)', '打胶', '#3IPC15003M', 'V01', '11'],
- ['ITO腐蚀', '#3ITE04008M', 'V01', '12'],
- ['去胶清洗', '#3SF109005M', 'V01', '13'],
- ['检查', '#3ZDJY0D1J1', 'V01', '14'],
- ['刻蚀区光刻(1712)', '正胶匀胶', '#2304J00102', 'V01', '15'],
- ['正胶曝光2FG0506-2-L', '#2KSQ00000T', 'V01', '16'],
- ['显影1', '#2CS0000150', 'V01', '17'],
- ['显影后检查', '#2XHJDQJQC1', 'V01', '18'],
- ['刻蚀N区', '刻蚀前烘烤', '#5HBKHX1001', 'V01', '19'],
- ['刻蚀GaN', '#5GaNET115K', 'V01', '20'],
- ['磨边', '磨边', '#5EDGMS1001', 'V01', '21'],
- ['刻蚀N区后清洗(1704)', '去胶清洗', '#3SF2U7010M', 'V01', '22'],
- ['打胶1', '#3IPC25015M', 'V01', '23'],
- ['去胶清洗', '#3SF009005M', 'V01', '24'],
- ['检查', '#3ZDJD5J3C2', 'V01', '25'],
- ['ITO退火', 'ITO退火', '#4ANLLG1001', 'V01', '26'],
- ['生长SiO2(1308)', '生长SiO2', '#4PVDPE2230', 'V01', '27'],
- ['钝化层光刻(1712)', 'HMDS', '#2HMDSXP150', 'V01', '28'],
- ['正胶匀胶', '#2304J00102', 'V01', '29'],
- ['正胶曝光2FG0506-3-M', '#2DHC00000T', 'V01', '30'],
- ['显影1', '#2CS0000150', 'V01', '31'],
- ['显影后检查', '#2XYHJYD5J1', 'V01', '32'],
- ['钝化层腐蚀(1712)', '打胶', '#3IPC15003M', 'V01', '33'],
- ['SiO2腐蚀', '#3BOE20590S', 'V01', '34'],
- ['去胶清洗', '#3SF2U7010M', 'V01', '35'],
- ['打胶1', '#3IPC25015M', 'V01', '36'],
- ['检查', '#3ZDJY0D1J1', 'V01', '37'],
- ['焊点光刻(1712)', '负胶匀胶', '#2202J00801', 'V01', '38'],
- ['负胶曝光2FG0506-4-N', '#2HDC00000T', 'V01', '39'],
- ['负胶后烘', '#2HH0303117', 'V01', '40'],
- ['显影1', '#2CS0000150', 'V01', '41'],
- ['显影后检查', '#2XHJD5J1C1', 'V01', '42'],
- ['蒸发前表面处理', '打胶2', '#3IPC05003M', 'V01', '43'],
- ['冲水(1)', '#3DIW0NC18T', 'V01', '44'],
- ['焊点蒸发(1612)', '焊点蒸发', '#4METEG112K', 'V01', '45'],
- ['蓝膜剥离', '#3METAL-OFF', 'V01', '46'],
- ['去胶清洗', '#3SFNUNC03M', 'V01', '47'],
- ['检查', '#3ZJDJQV1M2', 'V01', '48'],
- ['ESD测试', 'ESD测试', '#6COW050601', 'V01', '49'],
- ['减薄(1302)', '减薄接收', '#6GRDSTR001', 'V01', '50'],
- ['测片原始厚度', '#6wafert001', 'V01', '51'],
- ['粘片', '#6WAXBOND01', 'V01', '52'],
- ['测片厚度', '#6D16055401', 'V01', '53'],
- ['减薄', '#6GRD450120', 'V01', '54'],
- ['研磨(1709)', '研磨', '#6LAPP03091', 'V01', '55'],
- ['下蜡', '#6WAXMOVE01', 'V01', '56'],
- ['下蜡清洗', '#6CLEANING1', 'V01', '57'],
- ['下蜡清洗检验', '#6CLCHECK01', 'V01', '58'],
- ['减薄送出', '#6GRDEND001', 'V01', '59'],
- ['划片', '划片接收', '#7SLSTART01', 'V01', '60'],
- ['贴膜', '#7chipcoat1', 'V01', '61', '2018/6/27 23:06:27'],
- ['划片', '#7L1NG05061', 'V01', '62', '2018/6/27 23:29:27'],
- ['裂片(不扩膜-1312)', '裂片', '#7SPL050601', 'V01', '63', '2018/6/27 23:52:27'],
- ['裂片倒膜', '#7DETAPEHP1', 'V01', '64', '2018/6/28 0:15:27'],
- ['测试扩膜(1609)', '测试接收', '#8--RECEIVE', 'V01', '65', '2018/6/28 0:15:27'],
- ['测试(0904)', '#820050506P', 'V01', '66', '2018/6/28 0:15:27'],
- ['扩膜', '#9130BINC-K', 'V01', '67', '2018/6/28 0:38:27'],
- ['分选前检验(1609)', '圆片清洗', '#9WAF-Q-FIP', 'V01', '68', '2018/6/28 23:58:27'],
- ['分选前检验', '#80000AOI00', 'V01', '69', '2018/6/28 23:58:27'],
- ['分拣(1707)', '分拣', '#9OK-IP0506', 'V01', '70', '2018/6/28 23:58:27']]
复制代码
|